Handbook of Advanced Plasma Processing Techniques

Handbook of Advanced Plasma Processing Techniques

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This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.13.7 eV 90 8.8 eV 100 110 Wavelength 120 130 ( nanometers ) 140 Fig. 5.17. Vacuum ultraviolet ... Figure 5.18 shows a schematic of a VUV spectrometry system built to look at photon energies from ~4eV to 30 eV. A spectrometer of the anbsp;...

Title:Handbook of Advanced Plasma Processing Techniques
Author: R.J. Shul
Publisher:Springer Science & Business Media - 2000-08-28

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