MEMS design, fabrication, characterization, and packaging

MEMS design, fabrication, characterization, and packaging

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The combination of MEMS with light guide technology is one hybridisation pathway that is showing considerable potential. In the drive for novel functionality it is paramount that the performance parameters are not compromised, nor should the hybridisation ... on new and existing fibre networks is being driven by a data traffic load that is predicted to double every six months. ... An example of an emergent technology in the DWDM field is the planar waveguide circuit (PLC); optical chipsanbsp;...

Title:MEMS design, fabrication, characterization, and packaging
Author: Uwe F. W. Behringer, Deepak Uttamchandani, Society of Photo-optical Instrumentation Engineers, Scottish Enterprise, European Optical Society, Institution of Electrical Engineers
Publisher:Society of Photo Optical - 2001

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