Reactive Sputter Deposition

Reactive Sputter Deposition

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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.Furthermore, by making minor, nonfundamental changes to the model, it could also be used to investigate aspects of the magnetron ... to pulsed magnetron discharges, so that the model will become more widely applicable to a range of operating conditions. ... U.H. Kwon, S.H. Choi, Y.H. Park, W.J. Lee, Thin Solid Films 475, 17 (2005) 5. ... Technol.A6, 1827 (1988) 6. ... E. Shidoji, K. Ness, T. Makabe, Vacuum 60, 299 (2001) 10. ... W. M I┬łoller, M. Posselt, TRIDYN User Manual, 2002 15.


Title:Reactive Sputter Deposition
Author: Diederik Depla, Stijn Mahieu
Publisher:Springer Science & Business Media - 2008-06-24
ISBN-13:

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