Vacuum Microelectronics 1989

Vacuum Microelectronics 1989

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... N.Morita, Y.Hashimoto, K.Sano* and H.Nakanishi* Manufacturing Developement Laboratory, Mitsubishi Electric Corporation, ... The device was constructed of a deposited tungsten film on a sapphire substrate and a welded platinum wire lead. ... The substrate was made of a single crystal sapphire having a polished mirror-like Heating Element IW! ... A schematic diagram of the heating element Fig.

Title:Vacuum Microelectronics 1989
Author: Roy Edgar Turner
Publisher:Inst of Physics Pub Incorporated - 1989

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